AOI (Automated Optical Inspection)FVI-series / Generic 3D Inspection System
The system measures and inspects the height, coplanarity, and depth of a wide variety of products at high speed and with high accuracy. We meet the needs ranging from product development to small-lot production.
Feature
Bump height repeatability (3 σ ave. 1 μm or lower)
The stage and sensor can be changed according to the inspection object
The bird's eye and cross section views can be displayed easily
The KN-type product (Z-axis displacement method) can support a measurement range of up to 5 mm.
Inspection items/Applications
Bump height, flatness (such as surface, pattern and terminal, etc.), cylindrical parts, surface roughness measurement, convex height, concave depth, projection measurement, inspection of foreign matter contained in a transparent substance, glass, and resin.
Specifications
| Major measurement items | Bump Height Bump Coplanarity Bump Diameter |
|---|---|
| Field of View (FOV) | 6.0mm×6.0mm |
| Throughput | Varies depending on the workpiece |
| Z-measurement range | 80 ～ 5,000μm |
| XY-resolution | 7.8μm |
| Bump diameter | ≧60μm |
| Bump pitch | ≧100μm |
| Measurement repeatability (Height) | 3σ ave. ≦ 1μm |
| System size | (W)900mm×(D)1,100mm×(H)1,850mm |
Download
Download the catalog of FVI-series / Generic 3D Inspection System.